| Tartalmi leírás: |
A method for reducing the computation needs of modellingcomplete fabrication processes
for VLSI devices on personal computers in 3 dimensions, a treatment of equitations of basic
physical processes, such as diffusion, oxidation, implantation, etching and deposition is
presented. In the paper we will describe the structure of the TEDI (TechnologyDialog)
program, the main formulas and principles of the models and some examples of 3D process
simulation. The third part of the "TEDI" program (creating a set of control parameters,
automatic simulation and graphical output of results) provides flexible possibilities of
studyingthe connections between 1D, 2D and 3D simulations.
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